Optical measurement method of thickness layer e.g. for measurement of CD's DVD's, involves polarizing light in such manner that polarization plane runs essentially parallel to structural components of structure

摘要

The method involves polarizing light in such a manner, that a polarization plane runs essentially parallel to the structural components of the structure and/or essentially tangential to grooves (22). Multiplicity of the structural components of the structure and/or the grooves exhibit an essentially identical distance to each other, and that the wavelength or that wavelength coverage the layer of light is larger than the distance of the structural components. An independent claim is included for a device.