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经营范围
发明名称
Apparatus for inspecting a substrate
摘要
申请公布号
KR100492159(B1)
申请公布日期
2005.06.02
申请号
KR20020066613
申请日期
2002.10.30
申请人
发明人
分类号
H01L21/66;G01N21/01;G01N21/84;G01N21/95;G01N21/956;H01L21/00;H01L21/027;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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