| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive MEMS switch that stably operates with a low voltage, and its manufacturing method. SOLUTION: The high-frequency MEMS switch comprises a first anchor 7-2-1 formed on a substrate 3, a first spring 7-3-1 connected to the first anchor, an upper electrode 7-1 that is connected to the first spring and applies elastic deformation to the first spring to move above the substrate 3, a lower electrode 1 formed on the substrate located under the upper electrode, a second spring 7-3-2 connected to the upper electrode, and a second anchor 7-2-2 connected to the second spring. When a voltage is applied between the upper electrode and the lower electrode to move the upper electrode downwards, the second anchor comes into contact with the substrate, the second spring elastically deforms and the upper electrode then comes into contact with the lower electrode, so that the upper electrode and the second electrode are electrically connected. The first and second anchors, the first and second springs and the upper electrode are integrally manufactured from the same metal and become a membrane 7. COPYRIGHT: (C)2005,JPO&NCIPI
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