发明名称
摘要 PROBLEM TO BE SOLVED: To enable manufacturing of a mono-electron transistor or mono- electron memory acting stably at room temp., by two-dimensionally arranging quantum dots composed of a plurality of atom sets of specified diameters on an insulator at specified pitches. SOLUTION: A two-dimensional crystal with many white dots of an iron oxide and black parts of a remaining protein or Si around them is heat treated again in hydrogen at 300-500 deg.C for 60 min. to form many two-dimensionally arranged quantum elements from iron atom aggregates on a surface oxide film of a silicon substrate, the aggregate diameter is 5-10 nm and equal to that of the nucleus of a ferrum oxide in ferritin and an inter-aggregate pitch is 11-14 nm and equal to one side of a ferritin protein shell. By setting so that one of the aggregates M is a quantum well Q, adjacent two are drain D and source S, a fourth aggregate adjacent the quantum well Q is a gate G and using other aggregates M as a wiring, a mono-electron transistor is formed.
申请公布号 JP3653970(B2) 申请公布日期 2005.06.02
申请号 JP19980017819 申请日期 1998.01.14
申请人 发明人
分类号 H01L29/73;H01L21/288;H01L21/331;H01L21/368;H01L27/10;H01L29/06;H01L29/66;H01L29/80;H01L29/86;H01L51/00;H01L51/05;(IPC1-7):H01L29/06 主分类号 H01L29/73
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