NEGATIVE PHOTORESISTS FOR SHORT WAVELENGTH IMAGING

摘要

New negative-acting photoresist compositions are provided that are particularly useful for imaging at short wavelengths, particularly sub- 200 nm wavelengths such as 193 nm. Resists of the invention provide contrast between exposed and unexposed coating layer regions through crosslinking or other solubility switching mechanism. Preferred resists of the invention include a resin component that contains repeat units that facilitate aqueous base solubility.