| 摘要 |
PROBLEM TO BE SOLVED: To stabilize temperature in a thermostatic bath by releasing self heat generation generated by a fan that is rotated for stabilizing temperature distribution in the thermostatic bath. SOLUTION: A shutter open/close control section 105 that the thermostatic bath 2 has monitors whether temperature inside the thermostatic bath 2 exceeds the upper limit of allowable temperature for permitting deviation from a temperature for testing an original IC device D, when the fan 100 generates self heat generation by high-speed rotation, and operates a timer 105e, when the temperature exceeds the upper limit. A temperature-monitoring means 105a determines whether time measured by the timer 105e exceeds the limit time stored at a limit time storage section 105d, and closes a shutter device 20, when it has determined that the time has exceeded the limit time. After that, when the temperature inside the thermostatic bath 2 becomes lower than the upper limit of the allowable temperature, the shutter device 20 is opened. COPYRIGHT: (C)2005,JPO&NCIPI
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