发明名称 NONVOLATILE SEMICONDUCTOR STORAGE DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a ROM into which digital data can be written on a user side. <P>SOLUTION: In a memory cell array MA of the ROM, a plurality of interlayer insulating layers and a plurality of metal layers (including bit lines BL being a metal layer on an outermost layer) are alternately laminated on respective memory transistors. The insulating layers INS are formed on a W (tungsten) plug in a first contact hole FC2 installed in the first interlayer insulating layer 18. Digital data "1" or "0" is written into the respective memory transistors according to whether the insulating layer INS is broken down or not in accordance with prescribed writing voltage (high voltage) applied from a bit line BL. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005142260(A) 申请公布日期 2005.06.02
申请号 JP20030375382 申请日期 2003.11.05
申请人 SANYO ELECTRIC CO LTD 发明人 TANIGUCHI TOSHIMITSU;OKODA TOSHIYUKI
分类号 G11C17/08;G11C17/12;G11C17/16;H01L21/8246;H01L27/10;H01L27/112;H01L27/115;H01L29/76;H01L31/113;(IPC1-7):H01L27/10 主分类号 G11C17/08
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