| 摘要 |
PROBLEM TO BE SOLVED: To easily detect presence or no presence of leakage of gas from the periphery of an orifice for flow rate setting. SOLUTION: A first gas passage (23) is arranged in a first housing (18), and a second gas passage (24) is arranged in a second housing (19). An orifice plate (26) equipped with a plurality of orifices (27) is arranged between the first housing (18) and the second housing (19). The first gas passage (23) and the second gas passage (24) are communicated with each other via one orifice (27). Supply path sealing members (31) which can elastically be deformed are disposed at the periphery of an end part of the first gas passage (23) and an end part of the second gas passage (24), which face the orifice (27). A leak port (32) is opened to the outer face of a housing (17). A leak gas path (33) communicating the leak port (32) with the outer peripheral part of the supply path sealing member (31) is formed in the housing (17). COPYRIGHT: (C)2005,JPO&NCIPI
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