| 摘要 |
PROBLEM TO BE SOLVED: To provide a mask attachment and detachment device which changes a mask without breaking a vacuum in a vacuum vessel. SOLUTION: The masks 381 and 382 are attracted to the undersurface of a substrate holder 21 through a magnetic force of a magnet 35 in a magnet holder 33. A mask transfer portion 23 has a mask-attaching pin 43 and a magnet-pushing-up pin 44 which is longer than the pin 43. When the mask is detached, the magnet-pushing-up pin 44 is inserted into an open hole 34 right under the magnet holder 33, and pushes up the magnet 35 (c). Then, the mask 381 cannot receive a sufficient magnetic force from the magnet 35, and is detached from the substrate holder 21. When the mask is attached, the mask-attaching pin 43 is inserted into the open hole 34 (e). At this time, the mask-attaching pin 43 does not have such a length as to push up the magnet 35, so that the mask 382 previously mounted on the mask transfer portion 23 is kept attracted by the substrate holder 21. COPYRIGHT: (C)2005,JPO&NCIPI
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