发明名称 |
Method of and system for determining the aberration of an imaging system test object and detector for use with the method |
摘要 |
For determining aberrations of an optical imaging system (PL), a test object ( 12,14 ) comprising at least one delta test feature ( 10 ) is imaged either on an aerial scanning detector ( 110 ) or in a resist layer ( 71 ), which layer is scanned by a scanning device, for example a SEM. A new analytical method is used to retrieve from the data stream generated by the aerial detector or the scanning device different Zernike coefficients (Zn).
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申请公布号 |
US2005117148(A1) |
申请公布日期 |
2005.06.02 |
申请号 |
US20050499271 |
申请日期 |
2005.02.02 |
申请人 |
DIRKSEN PETER;JUFFERMANS CASPARUS ANTHONIUS H.;JANSSEN AUGUSTUS JOSEPHUS ELIZABETH M. |
发明人 |
DIRKSEN PETER;JUFFERMANS CASPARUS ANTHONIUS H.;JANSSEN AUGUSTUS JOSEPHUS ELIZABETH M. |
分类号 |
G01M11/02;G03F7/20;H01L21/027;(IPC1-7):G01B9/00 |
主分类号 |
G01M11/02 |
代理机构 |
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地址 |
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