| 发明名称 |
Wafer carrier door |
| 摘要 |
A wafer carrier door having an inner door portion and an outer door portion. The inner door portion has a substantially continuous inner surface. The outer door portion extends over at least a portion of the inner door portion. The outer door portion has a plurality of apertures formed therein. The outer door portion is attached to the inner door portion.
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| 申请公布号 |
US2005115591(A1) |
申请公布日期 |
2005.06.02 |
| 申请号 |
US20040983107 |
申请日期 |
2004.11.05 |
| 申请人 |
BURNS JOHN;FULLER MATTHEW A.;KING JEFFERY J.;FORBES MARTIN L.;SMITH MARK V. |
发明人 |
BURNS JOHN;FULLER MATTHEW A.;KING JEFFERY J.;FORBES MARTIN L.;SMITH MARK V. |
| 分类号 |
B08B3/00;B08B9/00;H01L;(IPC1-7):B08B3/00 |
主分类号 |
B08B3/00 |
| 代理机构 |
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代理人 |
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