发明名称 ELECTROSTATIC LEVITATION-TYPE GYRO DEVICE
摘要 PROBLEM TO BE SOLVED: To combine advantages without causing both improvements to spoil each other even if a signal detection circuit is improved so that the amplitude voltage of an application signal for detecting displacement is increased without sacrificing a control voltage, and a control circuit is improved so that a supply voltage is utilized efficiently and control capacity is improved. SOLUTION: A voltage signal V0 for detecting displacement is applied to electrodes 38, 48 for detecting displacement, and is divided when it is transmitted to a plurality of control electrodes 31-37, 41-47 through a gyro rotor 10, and is detected by in-phase detection circuit 92+93 attached to it, when the voltage signal reaches the output side of an output circuit 108 of each corresponding control output circuit 104. Additionally, control voltages V1a, V1b are subjected to pulse wave modulation, and the pulse end is overlapped to the sudden change point of the voltage signal V0 for detecting displacement. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005140708(A) 申请公布日期 2005.06.02
申请号 JP20030379208 申请日期 2003.11.07
申请人 TOKIMEC INC 发明人 MATSUMOTO MASAKATSU
分类号 G01P15/14;G01C19/08;G01C19/24 主分类号 G01P15/14
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