摘要 |
PROBLEM TO BE SOLVED: To provide a resistor element capable of realizing a temperature detecting circuit that can output a voltage having highly linear temperature characteristics by amplifying the voltage. SOLUTION: The resistor element 10 is constituted of a plurality of polysilicon resistors 12. The resistors 12 are provided on an oxidized film 24 (insulator) formed on a substrate 22 (a first resistor biasing conductor). Above the polysilicon resistors 12, on the other hand, a thin metallic plate 28 (second resistor biasing conductor) is disposed in parallel with the substrate 22 through an interlayer film 26 (insulator). Upon the substrate 22 and the thin metallic plate 28, independent voltages are respectively impressed. COPYRIGHT: (C)2005,JPO&NCIPI |