ARCH-TYPE PROBE AND PROBE CARD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an arch-type probe capable of endure the load of over driving, even if it is miniaturized, and to provide a probe card which uses it. SOLUTION: An arch type probe 200 has a shape comprising a first quadrant arc part 210 whose one end is supported by a base plate 100, and a second quadrant arc part 220 which is continuous with the other end of the first quadrant arc part 210 and extends toward the base plate 100. The second quadrant arc part 220 is set slightly shorter than the first quadrant arc part 210. The top part of the arch-type probe 200 is a contact surface that comes into contacts with an electrode 10 of a semiconductor wafer B. COPYRIGHT: (C)2005,JPO&NCIPI