发明名称 Anti-vibration technique
摘要 Disclosed is an anti-vibration technique and, specifically, an anti-vibration system and an offset data renewing method. The anti-vibration system according to an aspect of the present invention includes a supporting member for supporting a driving mechanism, an acceleration sensor for detecting acceleration of the supporting member, a driving unit for driving the supporting member, a storing unit for memorizing offset data to be used for offsetting an output of the acceleration sensor, an offset unit for offsetting an output of the acceleration sensor in accordance with the offset data memorized in the storing unit, a control unit for producing a driving signal in relation to the driving unit, on the basis of an output of the offset unit, and a renewing unit for renewing the offset data during a non-driving period of the driving mechanism, on the basis of an output of the acceleration sensor.
申请公布号 US2005119795(A1) 申请公布日期 2005.06.02
申请号 US20040987029 申请日期 2004.11.15
申请人 发明人 MORISADA MASAHIRO
分类号 G03F9/00;F16F15/02;G01M1/38;G05D19/02;H01L21/027;(IPC1-7):G01M1/38 主分类号 G03F9/00
代理机构 代理人
主权项
地址