发明名称 |
Resist pattern forming method, magnetic recording medium manufacturing method and magnetic head manufacturing method |
摘要 |
A mold having a pattern of a concavo-convex surface including protrusion and recess is prepared and the pattern is transferred to a resist layer formed on a substrate by an imprinting method. The side surface of a protrusion of the transferred resist pattern is then etched so that the protrusion has a width narrower than a width of the corresponding recess formed to the mold. This resist pattern forming method is preferably applicable to a magnetic recording medium manufacturing method and a magnetic head manufacturing method.
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申请公布号 |
US2005118817(A1) |
申请公布日期 |
2005.06.02 |
申请号 |
US20040982824 |
申请日期 |
2004.11.08 |
申请人 |
TDK CORPORATION |
发明人 |
FUJITA MINORU;TAKAI MITSURU |
分类号 |
G03F7/40;B05D3/10;G03F7/00;G11B5/31;G11B5/39;G11B5/74;G11B5/82;G11B5/84;G11B5/855;H01L21/027;(IPC1-7):H01L21/302;H01L21/461 |
主分类号 |
G03F7/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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