| 摘要 |
PROBLEM TO BE SOLVED: To shorten the start-up time of an inert gas circulating means. SOLUTION: The inert gas circulating means is provided, including: a circulating and supplying path 21 provided with an airtight chamber 1 with part of an exposure device body received and approximately shielded from external environments, and with a blower 3 for circulating a gas in the chamber 1 to lead the gas supplied from the blower 3 into the chamber 1; and a circulating return path 22 for returning the gas in the chamber 1 to the blower 3. On the middle of at least one of the circulating and supplying path and the circulating return path including a connection of the chamber 1 and the blower 3, a circulating path open/close valve CV1 capable of shutting off the path is provided. An inert gas exhaust port communicating with an exhaust path S2 is provided on the upstream of the circulating path across the valve CV1, and an inert gas supply port communicating with a supply path S3 is provided on the downstream. COPYRIGHT: (C)2005,JPO&NCIPI
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