Coil support unit, motor and exposure apparatus using the same, and device manufacturing method

摘要

An object of a coil support unit which supports a coil for generating a thrust to a movable portion is to support the coil such that stable thrust characteristics can be obtained. The coil support unit is characterized by constraining the coil in a thrust direction, and slidably supporting the coil in a direction perpendicular to the thrust direction on a moving surface.