SURFACE-COATED SEALING MATERIAL

摘要

Disclosed is a surface-coated sealing material which is improved in chemical resistance, plasma resistance and non-adhesiveness without deteriorating strength, hardness and sealing property of a rubber base. The sealing material has a coating film composed of at least one metal or metal compound selected from the group consisting of metals, metal oxides, metal nitrides, metal carbides and composites thereof, and the coating film is formed on a part of or the entire surface of a base which is composed of a soft material having a Shore D hardness of not more than 75 and a Shore A hardness of 40-100.