Imprinting machine and imprinting method

摘要

An object of the invention is to execute an imprinting process at a higher speed and a higher accuracy, in an imprinting apparatus. In an imprinting apparatus for contacting and pressurizing a mold having a micro concavo-convex structure formed on a surface thereof to a substrate surface in order to form a micro and nanometer size structure on a substrate, a step of pressurizing the mold and the substrate and a step of peeling the mold from the substrate are constituted by independent units, the mold and the substrate are moved in a closely attached state at a time of moving from the pressurizing step to the peeling step, and preferably at least two sets of molds and substrates are processed by the different steps simultaneously or a temporarily overlapped manner.