| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical inspection apparatus for a plate member and an optical inspection method for the plate member which precisely detect minute defects on a surface of the plate member. SOLUTION: A light from a light emitting unit 18 travels parallel to the surface 6a in the vicinity of the surface 6a of the plate member 6. A shade due to the defects (unevenness) on the surface 6a of the plate member 6 has articulate contrast to the other part, looms and is clarified. The shade is easily grasped, and detection precision is improved. Even if the defects (the unevenness) on the surface 6a of the plate member 6 are the minute defects 3 such as the unevenness of 0.2 mm or less, the minute defects can be visually and surely detected. COPYRIGHT: (C)2005,JPO&NCIPI
|
