| 摘要 |
PROBLEM TO BE SOLVED: To enhance yield of a droplet ejecting head by preventing a poor connection between first and second substrates from being caused by adhesion of foreign matters, and preventing the occurrence of a poor operation of the droplet ejecting head; to use an electrode of various materials as an electrode formed on the second substrate; and to inexpensively manufacture the droplet ejecting head. SOLUTION: This manufacturing method for the droplet ejecting head comprises: a first process wherein the first substrate 1 is constituted by forming an ejection chamber 6 and a diaphragm 5 in a silicon substrate 31; a second process wherein the second substrate is constituted by forming an electrode on a glass substrate; a third process wherein ultrasonic scrubbing and noncontact scrubbing are applied to a surface, facing the first substrate 1, of the second substrate; and a fourth process wherein the first and second substrates are joined together. COPYRIGHT: (C)2005,JPO&NCIPI
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