| 摘要 |
A method of manufacturing a branch optical waveguide is disclosed. According to the method, a resist pattern is formed by performing exposure using an exposure mask, and a core is formed by performing etching on a layer of a polymer resin material using the resist pattern as a mask. As a result, the branch optical waveguide is manufactured. In this method, the exposure mask includes a main body mask part and first and second branch mask parts branching off therefrom at a branch point part. The branch point part has a shape where first, second, and third linear edge parts connect the edge part of the first branch mask part and the edge part of the second branch mask part in a trapezoidal manner.
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