| 摘要 |
A method for making an optical grating element and its stamper is disclosed. The method is modified from the fabrication process of read-only optical disc to form a stamper with an optical grating element structure. Then, using the plastic mold-injection technology with the stamper as a mold to fabricate the precise optical grating element. The optical grating element and the stamper have very fine scales. The optical signal from the optical grating element can be easily read by using a common optical pick-up head that is reliable and resistant to vibration so as to meet the requirements of high precision control systems and overcome the problems of prior arts.
|
