Electrical detectors for microanalysis

摘要

Apparatus and methods for performing microanalysis of particles using a microelectrical-mechanical system (MEMS) chip to electrically interrogate the particles. The MEMS chip is typically manufactured using known lithographic micromachining techniques, employed for example, in the semiconductor industry. A substrate carries a plurality of microelectrodes disposed in a detection zone and spaced apart along an axis of a microchannel. The microchannel is sized in cross-section to cause particles carried by a fluid to move past the electrodes in single file. Impedance is measured between one or more pairs of electrodes to determine the presence of a particle in the detection zone. In certain embodiments used in cell manipulation, an electroporation signal may be applied between one or more pairs of electrodes to enhance permeability of a cell membrane. A structural arrangement may be provided to introduce a treatment substance into the microchannel in the vicinity of a cell, which may be restrained for a period of time in a treatment zone.