| 摘要 |
Disclosed is an optical instrument and an exposure apparatus having the same, wherein the optical instrument includes an optical element, a position adjusting member provided in relation to the optical member, a casing for accommodating the optical element therein, the casing having a partition wall from which at least a portion of the position adjusting member can be exposed, an outer cover for openably/closably covering the partition wall, and a supplying system for supplying an inactive gas into the casing.
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