METHOD FOR PRODUCING A LITHIUM MICROBATTERY

摘要

During the production of a lithium microbattery, the electrolyte comprising a lithiated compound is formed by successively depositing an electrolytic thin film (5a), a first protective thin film (6a) that is chemically inert in relation to the lithium, and a first masking thin film (7a) on a substrate (1) provided with current collectors (2a, 2b) and a cathode (3). According to the invention, a photolithography step is carried out on the first masking thin film in order to create a mask for selectively etching the first masking thin layer (7a), and the first protective thin layer (6a) and the electrolytic thin film (5a) are then selectively etched in such a way as to form the electrolyte in the electrolytic thin film (5a). This technique enables the electrolyte to be formed by photolithography and etching without causing any damage thereto.