| 摘要 |
PROBLEM TO BE SOLVED: To provide a frequency tunable resonant scanner. SOLUTION: The scanner is equipped with a means for increasing a spring constant of a bending spring formed vertically to the driving direction of a stage in which a mirror face is formed in the upper part. Thus, by increasing the spring constant of the bending spring that supports the stage, the resonant frequency of the stage is adjusted to enable the scanner to be used. COPYRIGHT: (C)2005,JPO&NCIPI
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