| 发明名称 |
Resonator device, electronic equipment provided with resonator device and method of manufacturing resonator device |
| 摘要 |
A resonator device includes a resonator supported by a substrate as a base. The resonator is connected to a wire extending from the substrate by wire bonding so as to be suspended in midair and supported over the supporting substrate.
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| 申请公布号 |
US2005116794(A1) |
申请公布日期 |
2005.06.02 |
| 申请号 |
US20040996380 |
申请日期 |
2004.11.23 |
| 申请人 |
MIZUNO SHINJI |
发明人 |
MIZUNO SHINJI |
| 分类号 |
H01L21/60;H03B5/30;H03H3/02;H03H9/02;H03H9/05;H03H9/10;H03H9/25;(IPC1-7):H03H9/54 |
主分类号 |
H01L21/60 |
| 代理机构 |
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代理人 |
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| 主权项 |
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