| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a compact dispense pump for reducing cost, and for precisely measuring and controlling the quantity of liquid. <P>SOLUTION: The dispensing pump is provided with a pump body 1 for sucking and discharging a fluid, a pipe 2 for guiding the fluid, a flow rate sensor 3 provided on an inner face of the pipe 2 and measuring the flow rate of the fluid and a filter 4, provided at the tip of the pipe 2 and having microholes. The flow rate sensor 3 has a strip electrode on a film substrate and is disposed at two or more inner face locations for determining the desired flow rate. When the fluid passes through the filter 4 attached at the tip of the pipe 2, the fluid goes into a laminar flow state, and interfusing air bubbles are divided and micronized, since the filter 4 has the microholes. Since the fluid is in a laminar flow state, the sucked/discharged fluid hardly generates pressure fluctuations, and the flow rate can be accurately measured. Since the air bubbles are micronized, influence of noise due to the air bubbles can be reduced, when the flow rate is measured. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
