| 摘要 |
PROBLEM TO BE SOLVED: To provide a connection part sealing structure for a fluid apparatus having corrosion resistance, coping with maintenance and contributing to miniaturization of apparatus. SOLUTION: This connection part sealing structure for a chemical solution valve 1 formed by connecting a manifold base 3 made of resin, to a valve part 4 made of resin, is provided with an H-shaped ring 20 made of resin and interposed between a connection part 7 of the base 3 and a connection part 19 of the valve part 4. Recesses and protrusions 21, 22 fitted to each other in rugged relation are respectively formed at the corresponding parts of the connection part 7 of the base 3 and the H-shaped ring 20. Recesses and protrusions 23, 24 fitted to each other in rugged relation are respectively formed at the corresponding parts of the connection part 19 of the valve part 4 and the H-shaped ring 20. At least one side of the corresponding recesses and protrusions 21, 22, and at least one side of the corresponding recesses and protrusions 23, 24 are provided with press-in margins in the wall thickness direction of the respective recesses and protrusions 21-24. COPYRIGHT: (C)2005,JPO&NCIPI
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