| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp capable of eliminating the effect of its own weight even if it is lengthened, and realizing a long-life and improvement of light emitting efficiency. SOLUTION: This excimer lamp provided with a hollow double-cylinder tube with a discharge space formed between an outer tube and an inner tube, an outer electrode arranged on the outside surface of the outer tube and an inner electrode arranged on the inner surface of the inner tube, generates excimer discharge in the discharge space by applying high-frequency voltages to emit excimer light. The internal electrode formed by winding a metal wire in a helical spring closely contacts with the inner surface of the inner tube, and the outer electrode formed by winding a metal wire in a helical spring closely contacts with the outside surface of the outer tube. COPYRIGHT: (C)2005,JPO&NCIPI
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