| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor with its outside dimensions very limited. SOLUTION: This pressure sensor is a micro electromechanical vibration device and comprises a silicon substrate 15 with a single-layer or multi-layer vibration assembly 121 formed thereon. The pressure sensor includes an electrode 21 for vibrating the assembly with respect to the substrate at a resonance frequency or another known frequency, and a detector for detecting an actual frequency and/or amplitude of the vibration. The actual frequency and/or amplitude is affected by conditions, especially by pressure in external environments. Fluctuations in frequency and amplitude with respect to values set by the electrode are used to measure pressure fluctuations in the surrounding environments. COPYRIGHT: (C)2005,JPO&NCIPI
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