Method and device for testing or calibrating a pressure sensor on a wafer

摘要

A method is provided for testing or calibrating a pressure sensor of a plurality of pressure sensors formed in a wafer, wherein the pressure sensor has a pressure-sensitive portion and a signal output. The method includes a step of connecting the pressure-sensitive portion of the pressure sensor to a fluid line in a pressure-tight way, a step of applying a predetermined pressure to the pressure-sensitive portion of the pressure sensor via the fluid line and a step of receiving a signal from the signal output of the pressure sensor.