| 摘要 |
A measuring method for measuring wave front of light, which passed through a target optical system includes the steps of, generating an interference fringe using a shearing interference with light that passes a target optical system, calculating a differential wave front between a first wave front of the light that passes the target optical system and a second wave front made by offsetting the first wave front by a predetermined amount in a predetermined direction, and correcting the differential wave front based on the predetermined amount and the wave number in the predetermined direction.
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