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发明名称
Alignment of trench for MOS
摘要
申请公布号
GB0508407(D0)
申请公布日期
2005.06.01
申请号
GB20050008407
申请日期
2005.04.26
申请人
AMI SEMICONDUCTOR BELGIUM BVBA
发明人
分类号
H01L21/336;H01L29/06;H01L29/40;H01L29/417;H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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