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发明名称
APPARATUS FOR REGENERATING WASTE SLURRY FOR USING PRODUCTION OF SEMICONDUCTOR DEVICES AND METHOD THEREOF
摘要
申请公布号
KR20050050907(A)
申请公布日期
2005.06.01
申请号
KR20030084566
申请日期
2003.11.26
申请人
C&G HI TECH CO., LTD.
发明人
HONG, SA MUN;HA, SANG SOO;KIM, JAE MIN
分类号
(IPC1-7):H01L21/304
主分类号
(IPC1-7):H01L21/304
代理机构
代理人
主权项
地址
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