发明名称 |
Pressure vessel systems and methods for dispensing liquid chemical compositions |
摘要 |
Apparatus and processes are presented to contact a dry, preferably high purity inert gas with a chemical composition in a pressure vessel, or a wetting composition, to form a wet inert gas, which is then used to pressurize the chemical composition out of the pressure vessel. No additional space is needed for an external humidifier. Since a very small amount of vapor is needed to form a wet inert gas, the composition of chemical composition will not be significantly affected.
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申请公布号 |
US6899116(B2) |
申请公布日期 |
2005.05.31 |
申请号 |
US20040830953 |
申请日期 |
2004.04.23 |
申请人 |
AMERICAN AIR LIQUIDE, INC. |
发明人 |
XU MINDI;WANG HWA-CHI;DULPHY HERVE E. |
分类号 |
B24B37/04;B24B57/02;C12N15/12;F04F1/06;H01L21/304;(IPC1-7):F04F1/06 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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