发明名称 |
Flexible membrane probe and method of use thereof |
摘要 |
A measuring apparatus for measuring a semiconductor wafer, or a film or coating thereon, includes an electrically conductive wafer chuck and a probe having a probe body defining an internal cavity in fluid communication with an electrically conductive and elastic or resilient membrane. The membrane and a topside of the semiconductor wafer are moved into spaced relation when the semiconductor wafer is supported by the wafer chuck. A pressure of fluid supplied to the internal cavity of the probe body is selectively controlled whereupon the membrane expands into contact with the topside of the semiconductor wafer. A suitable test stimulus is applied to the membrane and the semiconductor wafer and the response of the semiconductor wafer to the test stimulus is measured.
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申请公布号 |
US6900652(B2) |
申请公布日期 |
2005.05.31 |
申请号 |
US20030461073 |
申请日期 |
2003.06.13 |
申请人 |
SOLID STATE MEASUREMENTS, INC. |
发明人 |
MAZUR ROBERT G. |
分类号 |
H01L21/66;G01R1/073;(IPC1-7):G01R31/02;G01R27/26 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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