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发明名称
PLASMA PROCESSING APPARATUS
摘要
申请公布号
KR100491945(B1)
申请公布日期
2005.05.31
申请号
KR20000047118
申请日期
2000.08.16
申请人
发明人
分类号
H01L21/30;H01L21/302;C23F4/00;H01J37/32;H01L21/00;H01L21/3065;H05H1/46;(IPC1-7):H01L21/30
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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