发明名称 Devices containing platinum-iridium films and methods of preparing such films and devices
摘要 Methods for forming platinum-iridium films, particularly in the manufacture of a semiconductor device, and devices (e.g., capacitors, integrated circuit devices, and memory cells) containing such films.
申请公布号 US6900107(B2) 申请公布日期 2005.05.31
申请号 US20030639409 申请日期 2003.08.12
申请人 MICRON TECHNOLOGY, INC. 发明人 MARSH EUGENE P.
分类号 C23C16/06;C23C16/18;H01L21/02;H01L21/285;H01L21/60;H01L21/768;(IPC1-7):H01L21/20 主分类号 C23C16/06
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