发明名称 Photoresist processing aid and method
摘要 A composition and method to reduce photolithographic residue and scum formation on a substrate or in a solution, and to reduce or prevent foam formation. The composition contains a diphenyl oxide compound in combination with an antifoam agent. The composition may be added to developer solutions and stripper solutions used in manufacturing printed wiring boards.
申请公布号 US6900003(B2) 申请公布日期 2005.05.31
申请号 US20030408414 申请日期 2003.04.07
申请人 SHIPLEY COMPANY, L.L.C. 发明人 ANZURES EDGARDO;LUNDY DANIEL E.;BARR ROBERT K.;O'CONNOR COREY
分类号 G03F7/32;G03F7/42;(IPC1-7):G03F7/32 主分类号 G03F7/32
代理机构 代理人
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