A METHOD OF CLEANING BY REMOVING PARTICLES FROM SURFACES, A CLEANING APPARATUS AND A LITHOGRAPHIC PROJECTION APPARATUS,申请号SG20030005674-传众专利搜索

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发明名称	A METHOD OF CLEANING BY REMOVING PARTICLES FROM SURFACES, A CLEANING APPARATUS AND A LITHOGRAPHIC PROJECTION APPARATUS
摘要
申请公布号	SG111152(A1)	申请公布日期	2005.05.30
申请号	SG20030005674	申请日期	2003.09.10
申请人	ASML NETHERLANDS B.V.	发明人	HEERENS, GERT-JAN
分类号	B08B7/00;G03F1/00;G03F7/20;G03F7/32;H01L21/027;(IPC1-7):B08B7/00;B08B7/04	主分类号	B08B7/00
代理机构		代理人
主权项
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