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发明名称
PLASMA ETHCING EQUPIMENT
摘要
申请公布号
KR20050049694(A)
申请公布日期
2005.05.27
申请号
KR20030083392
申请日期
2003.11.22
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, NAM HEON
分类号
(IPC1-7):H01L21/306
主分类号
(IPC1-7):H01L21/306
代理机构
代理人
主权项
地址
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