| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that the convection generated by the temperature difference in the radial direction in a crucible or the temperature gradient on the wall surface of the crucible becomes a factor of the disturbance of the temperature in the vicinity of the solid-liquid interface, the deterioration in quality of a crystal or the generation of boundaries. SOLUTION: The convection between a flat plate member and the solid-liquid interface is suppressed by horizontally arranging the flat plate member in a melt in a crucible and holding the flat plate member at a small distance from the solid-liquid interface. Thereby, the temperature in the vicinity of the solid-liquid interface becomes stable, and it becomes possible to manufacture a large diameter, high quality single crystal. COPYRIGHT: (C)2005,JPO&NCIPI
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