| 发明名称 |
Methods and systems for reducing the effect of vibration in a vacuum-based semiconductor handling system |
| 摘要 |
Methods and systems are provided for reducing the effects of vibration in a vacuum-based semiconductor handling system, including methods and systems for tapering robotic arm components and tapering end effectors of robotic arm components to reduce vibration in the same.
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| 申请公布号 |
US2005111956(A1) |
申请公布日期 |
2005.05.26 |
| 申请号 |
US20040985843 |
申请日期 |
2004.11.10 |
| 申请人 |
BLUESHIFT TECHNOLOGIES, INC. |
发明人 |
VAN DER MEULEN PETER |
| 分类号 |
B25J17/00;B65G1/00;B66C1/00;F26B5/04;F26B13/30;G06F7/00;G06F19/00;H01L;H01L21/00;H01L21/677;(IPC1-7):B65G1/00 |
主分类号 |
B25J17/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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