| 摘要 |
PROBLEM TO BE SOLVED: To rapidly restore a trouble even when the trouble is generated in a projection optical system and a temperature control system such as a reticle stage, a substrate stage or the like. SOLUTION: An aligner has a rough adjustment system 73 for roughly adjusting the temperature of a temperature-control medium at a specified set temperature; a first fine adjustment system C1 finely adjusting the temperature of the medium cooled by a rough adjustment system 73, circulating the temperature of the medium to the projection optical system PL, and controlling the temperature; and second fine adjustment systems C5 and C6 finely adjusting the temperature of the medium temperature-controlled by the system 73, circulating the temperature of the medium to the substrate stage 5, and controlling the temperatures of the stages 2 and 5. The generation of the troubles in the fine adjustment systems C1, C5 and C6 is detected by detectors 69a, 76a and 79a. A controller 77 stops control valves 67, 80 and 84 for the fine adjustment systems in which the troubles are generated, and the set temperature of the rough adjustment system 73 is lowered in response to the balance of the amount of heat of the whole temperature control system. COPYRIGHT: (C)2005,JPO&NCIPI
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