| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a Y-θtable device which has a high plane parallelism before and after rotation. <P>SOLUTION: In the Y-θtable device 230 where an upper face table 140 capable of rotating at 90 degrees is provided on a base table 170 movable to one direction (Y direction), when the table is rotated, compressed air is fed to the space between the base table 170 and the upper surface table 140 so as to be floated up, and when it is fixed, the lower face of the upper face table 140 and the upper face of the base table 170 are made to be in close contact with each other by decompressed air. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
