| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a small piezoelectric vibrator by supporting a piezoelectric raw plate and hermetically sealing the plate by a conductive adhesive. SOLUTION: To attain the above purpose, a first plate in which a plurality of recessed containers of piezoelectric vibrators are integrally formed is covered with a second plate in which a plurality of lids of the piezoelectric vibrators are continuously formed, the piezoelectric vibrators are each hermetically sealed, and then the resulted product is separately cut into respective piezoelectric vibrators. Alternatively, a third plate in which a plurality of piezoelectric vibrators are formed on a planar substrate is covered with a fourth plate in which a plurality of U-shaped lids are continuously formed, the piezoelectric vibrators are each hermetically sealed, and the resulted product is separately cut into the respective piezoelectric vibrators. COPYRIGHT: (C)2005,JPO&NCIPI
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