| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a multilayer ceramic substrate having a cavity whose contracting variation is suppressed in an X-Y plane. SOLUTION: In the manufacturing method of the multilayer ceramic substrate, after forming properly inner electrodes, via electrodes, external electrodes, and a cavity in a green sheet for a base body which is made of a low-temperature sintered ceramic material, these are so laminated as to create an unbaked multilayer ceramic substrate having the cavity. On the other hand, an granular constraining material, paste, and slurry which have as their main bodies non-sintered inorganic materials at the sintering temperature of the low-temperature sintered ceramic material are created. After filling the granular constraining material into the cavity of the unbaked multilayer ceramic substrate, it is so molded pressingly and after applying or superimposing the paste or slurry of 50μm in their thicknesses to or on the top/rear surfaces of the unbaked multilayer ceramic substrate which includes the cavity and the external electrodes, constraining layers are so formed as to sinter this unbaked multilayer ceramic substrate at 800-1,000°C. Thereafter, the constraining layers and the granular constraining material are removed. COPYRIGHT: (C)2005,JPO&NCIPI |
